A/C compressor replaced, will it harm the system of I drive it before vacuuming the system and recharging it?

The compressor won't run when there's low or no pressure in the system, so driving the vehicle won't make any difference. Of more important concern is when barometric pressure goes up at times. That, in effect, puts the AC system into a slight vacuum. That can allow air to sneak in along with the humidity in it. That moisture gets removed when you evacuate the system, but you don't want to wait weeks or months to do that.

The chance of that humidity actually getting into a sealed system is very slim, but we always add that to the discussion to be on the safe side. As long as you pump the system into a vacuum before too long, you have nothing to worry about.